Modeling Inverse Ellipsometry Problem via Flow Matching with a Large-Scale Dataset

ArXi:2407.17869v2 Announce Type: replace Inverse ellipsometry, i.e., reconstructing optical constants and film thickness from the measured phase difference $\Delta$ and amplitude ratio $\Psi$, is a fundamentally ill-posed problem. Traditional solutions rely on slow, expert-driven iterative fitting, while the development of machine learning approaches has been severely limited by the lack of large-scale, physically consistent datasets. To address this gap, we