Cyber-Physical Systems Security: A Comprehensive Review of Anomaly Detection Techniques

ArXi:2502.13256v2 Announce Type: replace-cross In an increasingly interconnected world, Cyber-Physical Systems (CPS) are essential to critical industries like healthcare, transportation, and manufacturing, merging physical processes with computational intelligence. However, the security of these systems is a major concern. Anomalies, whether from sensor malfunctions or cyberattacks, can lead to catastrophic failures, making effective detection vital for preventing harm and service disruptions. This paper provides a comprehensive review of anomaly detection techniques in